Plasma processing system with direct outlet toroidal plasma source

ABSTRACT

A plasma processing system includes a process chamber and a plasma source that generates a plasma in a plasma cavity. The plasma cavity is substantially symmetric about a toroidal axis. The plasma source defines a plurality of outlet apertures on a first axial side of the plasma cavity Plasma products produced by the plasma pass in the axial direction, through the plurality of outlet apertures, from the plasma cavity toward the process chamber. A method of plasma processing includes generating a plasma within a substantially toroidal plasma cavity that defines a toroidal axis, to form plasma products, and distributing the plasma products to a process chamber through a plurality of outlet openings substantially azimuthally distributed about a first axial side of the plasma cavity, directly into a process chamber.

TECHNICAL FIELD

The present disclosure applies broadly to the field of plasma processing equipment. More specifically, systems and methods for providing spatially uniform plasma products are disclosed.

BACKGROUND

Semiconductor processing often utilizes plasma processing to etch, clean or deposit material on semiconductor wafers. All such processes are advantageously highly uniform over the entire surface of a processed wafer. Wafer sizes have increased while feature sizes have decreased, significantly over the years, so that more integrated circuits can be harvested per wafer processed. Typical wafer diameters increased from about 2 or 3 inches in the 1970s to 12 inches or more in the 2010s. Over the same time frame, typical minimum feature sizes of commercial integrated circuits decreased from about 5 microns to about 0.015 microns. Processing smaller features while wafers grow larger requires significant improvements in processing uniformity. Plasma processing of workpieces other than wafers may also benefit from improved processing uniformity.

SUMMARY

In an embodiment, a plasma processing system includes a process chamber and a plasma source that generates a plasma in a plasma cavity. The plasma cavity is substantially symmetric about a toroidal axis. The plasma source defines a plurality of outlet apertures on a first axial side of the plasma cavity Plasma products produced by the plasma pass in the axial direction, through the plurality of outlet apertures, from the plasma cavity toward the process chamber.

In an embodiment, a plasma processing system includes a process chamber that is substantially radially symmetric about a chamber axis, an outer plasma source that generates a first plasma in an outer plasma cavity, and an inner plasma source that generates a second plasma in an inner plasma cavity. The outer plasma cavity and the inner plasma cavity are radially symmetric about a toroidal axis that is coincident with the chamber axis. The inner plasma cavity is radially inward from the outer plasma cavity. The outer and inner plasma cavities are in fluid communication with the process chamber through respective outer and inner outlet openings along a first axial side of the outer plasma source, such that plasma products produced by the first plasma pass in the axial direction, through the outer and inner outlet openings, from the outer and inner plasma cavities toward the process chamber.

In an embodiment, a method of plasma processing includes generating a plasma within a substantially toroidal plasma cavity that defines a toroidal axis, to form plasma products, and distributing the plasma products to a process chamber through a plurality of outlet openings substantially azimuthally distributed about a first axial side of the plasma cavity, directly into a process chamber.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 schematically illustrates major elements of a plasma processing system, according to an embodiment.

FIG. 2 schematically illustrates selected elements of a direct outlet toroidal plasma source, according to an embodiment.

FIG. 3 schematically illustrates selected elements of a direct outlet toroidal plasma source, according to an embodiment.

FIG. 4 schematically illustrates selected elements of a direct outlet toroidal plasma source, according to an embodiment.

FIG. 5 schematically illustrates selected elements of a direct outlet toroidal plasma source, according to an embodiment.

FIG. 6 is a schematic cutaway view of the direct outlet toroidal plasma source of FIG. 5, taken at broken line 6-6.

FIG. 7 is a schematic cutaway view of the direct outlet toroidal plasma source of FIG. 5, taken at broken line 7-7.

FIG. 8 schematically illustrates a direct outlet toroidal plasma source having a plasma cavity that is defined by disposing a plasma block adjacent a plate, according to an embodiment.

FIG. 9 schematically illustrates another direct outlet toroidal plasma source having a plasma cavity that is defined by disposing a plasma block adjacent a plate, according to an embodiment.

FIG. 10 schematically illustrates a direct outlet toroidal plasma source, showing an inlet gas manifold that supplies source gases to a plasma cavity therein, according to an embodiment.

FIG. 11 is a schematic cutaway view along line 11-11 of FIG. 10.

FIG. 12 schematically illustrates a plasma block of a direct outlet toroidal plasma source with an inline gas injection port for introducing source gases, according to an embodiment.

FIG. 13 schematically illustrates a plasma block of a direct outlet toroidal plasma source with a plurality of inline gas injection ports for introducing source gases, according to an embodiment.

FIG. 14 schematically illustrates a plasma block of a direct outlet toroidal plasma source, showing how outlet apertures may be defined at a plurality of angles with respect to a surface normal of a plate that forms one axial side thereof, according to an embodiment.

FIG. 15A is a schematic bottom view illustrating a direct outlet toroidal plasma sources in which four outlet apertures are defined, according to an embodiment.

FIG. 15B is a schematic bottom view illustrating a direct outlet toroidal plasma sources in which over sixty outlet apertures are defined, according to an embodiment.

FIG. 16 schematically illustrates, in a cross-sectional view, a plasma wafer processing system that includes two direct outlet toroidal plasma sources, according to an embodiment.

FIG. 17A schematically illustrates an upward facing, schematic plan view of a top surface of the plasma processing system of FIG. 16, with features of a bottom plate of the two direct toroidal plasma sources visible.

FIG. 17B schematically illustrates an upward facing, schematic plan view of a diffuser plate of the plasma processing system of FIG. 16.

FIG. 18 schematically illustrates, in a cross-sectional view, a plasma wafer processing system that includes two direct outlet toroidal plasma sources, according to an embodiment.

DETAILED DESCRIPTION

The present disclosure may be understood by reference to the following detailed description taken in conjunction with the drawings described below, wherein like reference numerals are used throughout the several drawings to refer to similar components. It is noted that, for purposes of illustrative clarity, certain elements in the drawings may not be drawn to scale. Specific instances of an item may be referred to by use of a numeral in parentheses (e.g., plasma blocks 210(1), 210(2), etc.) while numerals without parentheses refer to any such item (e.g., plasma blocks 210). In instances where multiple instances of an item are shown, only some of the instances may be labeled, for clarity of illustration.

FIG. 1 schematically illustrates major elements of a plasma processing system 100, according to an embodiment. System 100 is depicted as a single wafer, semiconductor wafer plasma processing system, but it will be apparent to one skilled in the art that the techniques and principles herein are applicable to plasma generation systems of any type (e.g., systems that do not necessarily process wafers or semiconductors). It should also be understood that FIG. 1 is a simplified diagram illustrating only selected, major elements of system 100; an actual processing system will accordingly look different and likely contain additional elements as compared with system 100.

Processing system 100 includes a housing 110 for a wafer interface 115, a user interface 120, a plasma processing unit 130, a controller 140 and one or more power supplies 150. Processing system 100 is supported by various utilities that may include gas(es) 155, electrical power 170, vacuum 160 and optionally others. Internal plumbing and electrical connections within processing system 100 are not shown, for clarity of illustration.

Processing system 100 is illustrated as a so-called indirect, or remote, plasma processing system that generates a plasma in a first location and directs the plasma and/or plasma products (e.g., ions, molecular fragments, free radicals, energized species and the like) to a second location where processing occurs. Thus, in FIG. 1, plasma processing unit 130 includes a remote plasma source 132 that supplies plasma and/or plasma products for a process chamber 134. Process chamber 134 includes one or more wafer pedestals 135, upon which wafer interface 115 places a workpiece 50 for processing. Workpiece 50 is, for example, a semiconductor wafer, but could any other type of workpiece to be subjected to plasma processing. In operation, gas(es) 155 are introduced into plasma source 132 and a radio frequency generator (RF Gen) 165 supplies power to ignite a plasma within plasma source 132. Plasma and/or plasma products pass from plasma source 132 to process chamber 134, where workpiece 50 is processed. Typical present day systems may, for example, transfer the plasma and/or plasma products through a nozzle 133 and/or a diffuser plate 137 in an attempt to spread and apply them uniformly. An actual plasma system may provide many other optional features or subsystems through which plasma, plasma products and/or carrier or additional processing gases flow and/or mix between plasma source 132 and process chamber 134.

The elements illustrated as part of system 100 are listed by way of example and are not exhaustive. Many other possible elements, such as: pressure and/or flow controllers; gas or plasma manifolds or distribution apparatus; ion suppression plates; electrodes, magnetic cores and/or other electromagnetic apparatus; mechanical, pressure, temperature, chemical, optical and/or electronic sensors; wafer or other workpiece handling mechanisms; viewing and/or other access ports; and the like may also be included, but are not shown for clarity of illustration. Various control schemes affecting conditions in process chamber 134 are possible. For example, a pressure may be maintained by monitoring the pressure in process chamber 134 and adjusting all gas flows upwards or downwards until the measured pressure is within some tolerance of a desired pressure. Temperatures can be controlled by adding heaters and temperature sensors. Optical sensors may detect emission peaks of plasmas as-generated and/or as they interact with workpieces.

Internal connections and cooperation of the elements illustrated within system 100 are also not shown for clarity of illustration. In addition to RF generator 165 and gases 155, other representative utilities such as vacuum 160 and/or general purpose electrical power 170 may connect with system 100. Like the elements illustrated in system 100, the utilities illustrated as connected with system 100 are intended as illustrative rather than exhaustive; other types of utilities such as heating or cooling fluids, pressurized air, network capabilities, waste disposal systems and the like may also be connected with system 100, but are not shown for clarity of illustration. Similarly, while the above description mentions that plasma is ignited within remote plasma source 132, the principles discussed below are equally applicable to so-called “direct” plasma systems that create a plasma in a the actual location of workpiece processing.

Although an indirect plasma processing system is illustrated in FIG. 1 and elsewhere in this disclosure, it should be clear to one skilled in the art that the techniques, apparatus and methods disclosed herein may also be applicable to direct plasma processing systems—e.g., where a plasma is ignited at the location of the workpiece(s). Similarly, in embodiments, the components of processing system 100 may be reorganized, redistributed and/or duplicated, for example: (1) to provide a single processing system with multiple process chambers; (2) to provide multiple remote plasma sources for a single process chamber; (3) to provide multiple workpiece fixtures (e.g., wafer pedestals 135) within a single process chamber; (4) to utilize a single remote plasma source to supply plasma products to multiple process chambers; and/or (5) to provide plasma and gas sources in serial/parallel combinations such that various source gases may be activated (e.g., exist at least temporarily as part of a plasma) zero, one, two or more times, and mixed with other source gases before or after they enter a process chamber, and the like. Gases that have not been part of a plasma are sometimes referred to as “un-activated” gases herein.

FIG. 2 schematically illustrates selected elements of a direct outlet toroidal plasma source 200, according to an embodiment. Plasma source 200 is an example of remote plasma source 132, FIG. 1. A useful coordinate system that will be used herein for describing the features shown in FIG. 2 and elsewhere defines axial positions as being along a toroidal axis 1, radial directions 2 as denoting distance from toroidal axis 1, and azimuthal directions 3 as denoting rotational direction about toroidal axis 1. Plasma sources disclosed herein will be considered to define a toroidal axis that passes through a centroid of the plasma source (not necessarily through a physical feature of the plasma source), with a plasma generation cavity of the plasma source being generally toroidal, radially symmetric with respect to the toroidal axis, and extending about the toroidal axis in a plane that is perpendicular to the toroidal axis. A major circumference 21 of a toroidal element is defined as extending azimuthally about the toroidal axis at its outer bound, e.g., as shown for plasma block 210(1) below; major circumference 21 is not shown extending all the way around plasma block 210(1) in FIG. 2, for clarity of illustration. A minor circumference extends about an element such as plasma block 210(1) at a single azimuthal location relative to the toroidal axis 1, e.g., as shown as minor circumference 22, FIG. 2.

Plasma source 200 includes plasma block 210(1), a magnetic element 220(1) and an induction coil 230. Magnetic element 220(1) extends at least partially about plasma block 210(1), and induction coil 230 winds at least partially about magnetic element 220(1). Although magnetic element 220(1) is shown in a toroidal shape, it is not necessary that magnetic elements 220 be toroidal, have a round cross section or extend completely about a plasma block 210. Plasma block 210(1) may be evacuated, and plasma source gases may be introduced into plasma block 210(1). With the plasma source gases within plasma block 210(1), current is passed through induction coil 230, inducing magnetic flux within magnetic element 220(1), which in turn induces an electric current within plasma block 210(1), igniting a plasma.

Plasma source 200 can thus be seen to resemble a transformer in which a primary current flows through induction coil 230 and a secondary current flows within plasma block 210(1). Advantageously, plasma source 200 confines the secondary current within the gases and/or plasma ignited within plasma block 210(1), thus, advantageously, plasma block 210(1) is not formed of a conductor that defines a complete azimuthal circuit. In certain embodiments, plasma block 210(1) is fabricated of a dielectric material, however, as discussed below, aluminum is often a convenient material from which to make at least portions of plasma block 210(1). When plasma block 210(1) is made from aluminum or another substantially conductive material, external fields can be coupled into plasma block 210(1) and the azimuthal circuit path can be interrupted by including one or more dielectric breaks 240 that extend about the minor circumference of plasma block 210(1).

Plasma block 210(1) defines a plurality of output apertures, at multiple azimuthal locations, but on a single axial side thereof, through which plasma products are distributed, for use in plasma processing. For example, in FIG. 2, the output apertures are not visible, but connect with outlets 250 to distribute the plasma products in the direction of the arrows shown. By providing output apertures at multiple azimuthal locations about one axial side of plasma block 210(1), plasma source 200 advantageously provides a circular distribution of outlets 250 such that plasma products provided therein are equally distant from the plasma that generates them. This allows direct coupling of a circular pattern of plasma products to a process chamber, such that the plasma products reach the process chamber in a circular and spatially broad pattern while all points of the pattern are at a substantially equal distance from the plasma.

One advantage of the direct outlet toroidal plasma source embodiments herein lies in providing plasma products across a wide and circularly symmetric pattern in which all points are substantially equidistant from the plasma. This minimizes differences in recombination effects and wall effects that would otherwise affect process results at differing locations. While typical inductive plasma systems may generate plasma products utilizing a toroidal plasma chamber, such systems typically distribute the plasma products through a single port or nozzle that provides differing distances from the plasma to various locations on the workpiece.

Another advantage of the embodiments herein lies in the ability to generate plasmas at relatively high pressures without excessive sputtering damage to internal surfaces due to ions being accelerated by high electric fields. Embodiments herein can be operated, for example in pressure regimes of 0.5 Torr or less to 100 Torr or more. Other types of inductively coupled plasma sources often expose plasma blocks to high electric fields, such fields typically arising from induction coils that are positioned near to the plasma block. Ions in the plasma that experience such fields are accelerated in the direction of the fields, often striking the internal plasma block walls and sputtering the material thereof. Sputtering damage results in reduced equipment lifetime and/or excessive maintenance requirements, incurring labor and material costs, and tool downtime. In contrast, the designs herein minimize exposure of plasma blocks to electric fields except along the direction of the toroidal plasma cavity, such that magnetic flux steered by magnetic elements generates secondary current within the plasma itself without introducing electric fields that would cause sputtering of the plasma block surfaces. This, in turn, enables at least some embodiments herein to use plasma blocks made primarily of aluminum with untreated surfaces, as opposed to more expensive materials, or aluminum with specially treated surfaces. Treated surfaces remain an option.

Magnetic elements 220 herein are typically formed of ferrite. Induction coils 230 are typically formed of copper, optionally plated with silver for decreased outer skin electrical resistivity. Both magnetic elements 220 and induction coils 230, and certain regions or parts of plasma blocks 210, may include channels for cooling gases or liquids, as discussed further herein, to remove heat generated by electrical and magnetic losses during operation. As noted above, plasma blocks 210 may be fabricated of aluminum with untreated surfaces, or with surface treatments such as anodization, or alumina, aluminum nitride or yttria coatings. Other material choices are also possible and may be made by considering cost, machinability, electrical conductivity, thermal expansion, heat dissipation characteristics, and compatibility with intended gases and plasma products.

FIG. 3 schematically illustrates selected elements of a direct outlet toroidal plasma source 300. Plasma source 300 shares many of the same elements with plasma source 200, FIG. 2, but includes a plasma block 210(2), two magnetic elements 220(1) with respective induction coils 230. The toroidal axis 1, radial direction 2 and azimuthal direction 3 are shown again in FIG. 3 for reference. For symmetric and efficient plasma generation, magnetic elements 220(1) are located azimuthally opposite one another about plasma block 210(2). Also, plasma block 210(2) of plasma source 300 includes four dielectric breaks 240; two dielectric breaks 240 are located near magnetic elements 220(1) while the other two are located at 90 degree intervals about the circumference of plasma block 210(2) from magnetic elements 220(1).

FIG. 4 schematically illustrates selected elements of a direct outlet toroidal plasma source 400. Plasma source 400 shares many of the same elements with plasma source 200 and 300, but includes two magnetic elements 220(2) that are U- or horseshoe-shaped, instead of toroidal. Use of U- or horseshoe-shaped magnetic elements helps facilitate certain constructions of direct outlet toroidal plasma sources, as further described below.

FIG. 5 schematically illustrates selected elements of a direct outlet toroidal plasma source 500. Toroidal axis 1, radial direction 2 and azimuthal direction 3 are not shown again in FIG. 5, for clarity of illustration, but remain as defined in FIG. 2. Plasma source 500 shares many of the same elements with plasma source 200, 300 and 400. Plasma block 210(3) includes metal sections 245 with dielectric breaks 240 (two of which are hidden by magnetic elements 220(3) in the view of FIG. 5. Plasma block 210(3) is flattened on an axial side 211(1) (labeled, but hidden in the view of FIG. 5). Plasma block 210(3) defines inlet apertures 260 in sections 245. Plasma block 210(3) also defines outlet apertures 270 on axial side 211(2), as shown. The locations and numbers of inlet apertures 260 and outlet apertures 270 shown in FIG. 5 are merely illustrative; not all instances of such apertures are shown or labeled, for clarity of illustration. In practice, inlet apertures 260 may be located to provide uniform source gas introduction into plasma block 210(3), but may otherwise be arranged for convenient integration with other components of plasma source 500. Outlet apertures 270 are typically more numerous than shown in FIG. 5, are arranged to provide uniform plasma product distribution to an adjacent process chamber, and may be defined either in sections 245 or dielectric breaks 240 (see FIGS. 6 and 7). Broken lines 6-6 and 7-7 denote planes at which the cutaway views shown in FIGS. 6 and 7, respectively, are taken.

FIGS. 6 and 7 are schematic cutaway views of direct outlet toroidal plasma source 500 taken at broken lines 6-6 and 7-7, respectively, of FIG. 5. FIG. 6 shows the cutaway taken through one of dielectric breaks 240 (hidden beneath magnetic elements 220(3) in the view of FIG. 5). The toroidal axis 1 and radial direction 2 are shown again in FIGS. 6 and 7 for reference; azimuthal direction arcs in or out of the planes of FIGS. 6 and 7, changing sign from left to right of toroidal axis 1. Some outlet apertures 270 are defined by dielectric break 240 on axial side 211(2) of plasma block 210(3), as shown. A plasma cavity 280, and a plasma 299 formed therein, are also shown. FIG. 7 shows the cutaway taken through one of metal sections 245. Some outlet apertures 270 are defined by dielectric break 240 on axial side 211(2) of plasma block 210(3), as shown. Plasma cavity 280, and plasma 299 formed therein, are also shown.

FIGS. 6 and 7 also show cooling tubes 275 through magnetic elements 220(3). Cooling tubes 275 may provide fluid connections for gases or liquids to remove heat dissipated by magnetic elements 220(3); the feature of providing cooling channels is contemplated for any of the magnetic elements described herein, although not shown in many cases for clarity of illustration. Similarly, cooling tubes may be provided in induction coils 230 and/or various other plasma source components; some such arrangements are shown and described herein while others are not, for clarity of illustration.

FIG. 8 schematically illustrates a portion of a direct outlet toroidal plasma source 600 in which a plasma cavity 280 is defined by disposing a plasma block 210(4) adjacent a plate 610. A direction 10 of the toroidal axis, and radial direction 2 are shown again in FIG. 8 for reference. The actual toroidal axis passes through a centroid of plasma cavity 280, outside the view of FIG. 8; an azimuthal direction arcs in and out of the plane of FIG. 8. For manufacturability and maintenance purposes, it may be advantageous to provide a plasma cavity defined by components that are easily machinable and interchangeable. Plasma source 600 thus defines plasma cavity 280 by providing plasma block 210(4) as a relatively simple shape, with the ability to seal plasma block 210(4) to plate 610 that defines outlet apertures 270 therein. The ability to seal plasma block 210(4) to plate 610 is provided by grooves 615 in plate 610 that accommodate one or more o-rings 620. When plasma cavity 280 is evacuated, external atmospheric pressure forces plasma block 210(4) against o-rings 620 to form the seal. In the embodiment shown in FIG. 8, plate 610 is formed of a dielectric material. Suitable materials for plate 610, as well as dielectric breaks 240, include ceramics, in particular aluminum nitride or aluminum oxide, or fused quartz. Forming plate 610 of a dielectric material allows dielectric breaks 240 of plasma block 210(4) to interrupt azimuthal currents so that plasma 299 can form; that is, if plate 610 were formed of metal and were electrically coupled to plasma block 210(4), electric currents induced by the magnetic elements would merely race around the azimuthal circuit thus formed, reducing the coupling of electric fields into plasma cavity 280. Dielectric breaks 240 extend completely around the minor circumference of plasma blocks 210 herein; in the azimuthal direction, dielectric breaks 240 need to be of sufficient width to inhibit electrical arcing of adjacent metal segments of the plasma block 210, such as about one quarter inch to one inch.

FIG. 9 schematically illustrates a direct outlet toroidal plasma source 700 having a plasma cavity 280 that is defined by disposing a plasma block 210(5) adjacent a plate 710. Direction 10 of the toroidal axis, and radial direction 2, are shown again in FIG. 9 for reference; azimuthal direction arcs in and out of the plane of FIG. 9. Plate 710 is formed of a conductor, and includes a dielectric barrier 720 at a surface thereof that contacts plasma block 210(5). Dielectric barrier 720 thus defeats shorting of plasma block 210(5) to the conductor forming plate 710, to interrupt the azimuthal currents that would otherwise form. Plasma source 700 thus defines plasma cavity 280 by providing plasma block 210(5) as a relatively simple shape, with the ability to seal plasma block 210(5) to plate 710 that defines outlet apertures 270 therein. The ability to seal plasma block 210(4) to plate 710 is provided by grooves 715 in plasma block 210(5) that accommodate one or more o-rings 620. When plasma cavity 280 is evacuated, external atmospheric pressure forces plate 710 against o-rings 620 to form the seal. The design illustrated in FIG. 9 enables plasma block 210(5) and plate 710 to be held at different potentials; this allows control of a ratio of radicals to ions within plasma products emitted through output apertures 270 toward a processing location. FIG. 9 also shows cooling tubes 775 that provide gas or liquid cooling of plate 710. Cooling tubes 775 may be provided in other components herein, such as plasma blocks, top or bottom plates of plasma sources or plasma chambers, or side walls of plasma chambers.

FIG. 10 schematically illustrates a direct outlet toroidal plasma source 800, showing an inlet gas manifold 810 that supplies source gases to a plasma cavity therein. Radial direction 2 and azimuthal direction 3 are shown in FIG. 10 for reference; the toroidal axis 1 extends out of the plane of FIG. 10. The top view illustrated in FIG. 10 shows magnetic elements 220(3) on opposing sides of a plasma block 210(6), with a pair of gas manifolds 810 on either side. Each of gas manifolds 810 receives source gases through one or more inlets 820; although only one inlet 820 is illustrated in FIG. 10, it is understood that inlets 820 may vary in number and position. Gas manifold 810 distributes the source gases into plasma block 210(6) through apertures therein, as now discussed. A broken line 11-11 indicates a cross-sectional plane of plasma source 800 that is illustrated in further detail in FIG. 11.

FIG. 11 is a schematic cutaway view along broken line 11-11 of FIG. 10, illustrating direct outlet toroidal plasma source 800. The toroidal axis 1 and radial direction 2 are shown again in FIG. 11 for reference; azimuthal direction arcs in or out of the plane of FIG. 11, changing sign from left to right of toroidal axis 1. An inlet gas stream is introduced into gas manifolds 810 through inlet apertures 820, then passes into plasma cavity 280 through apertures 830 defined by plasma block 210(6). Inlet apertures 820 are shown as vertical (e.g., parallel with toroidal axis 1) in the view of FIG. 11, but may be defined at other angles to encourage mixing or other effects in plasma cavity 280 (see also FIGS. 12 and 13). Gas manifold 810 may be constructed to contain only a small gas volume so that changes in the source gas stream (e.g., introduced by upstream valves or other gas management equipment) rapidly transfer into plasma cavity 280. Gas manifold 810 may include a pressure sensor to provide information about pressure therein, to facilitate understanding of factors affecting plasma processing. Material choices for a gas manifold 810 are the same as for a plasma block 210 that it is associated with; for example metals such as aluminum, with or without treated surfaces, or dielectrics such as alumina, aluminum nitride, and other ceramics are possible choices. When gas manifold 810 and its associated plasma block 210 are both made of metal, it may be desirable to isolate gas manifold 810 from plasma block 210 and/or to provide dielectric breaks in gas manifold 810, to avoid completing an azimuthal electrical circuit, as discussed above.

FIG. 12 schematically illustrates a plasma block 210(7) of a direct outlet toroidal plasma source with an inline gas inlet aperture 850 for introducing source gases. The toroidal axis 1, radial direction 2 and azimuthal direction 3 are shown again in FIG. 12 for reference. Inline gas inlet aperture 850 is substantially azimuthally aligned with plasma cavity 280, as shown. Introducing a source gas stream through gas inlet aperture 850 imparts an azimuthal velocity to the injected gas to encourage thorough mixing within plasma block 210(7). In embodiments, inline gas inlet aperture 850 may be exactly azimuthally aligned, as shown in FIG. 12, however in other embodiments an inline gas inlet aperture may be only partially aligned, for example defining an angle where it intersects plasma cavity 280. A source gas passing through an inline gas inlet aperture 850 at any angle having a nonzero azimuthal component relative to the toroidal axis will generate at least some azimuthal velocity in the gas as it is introduced into plasma cavity 280.

FIG. 13 schematically illustrates a plasma block 210(8) of a direct outlet toroidal plasma source with a plurality of inline gas inlet apertures 850. The toroidal axis 1, radial direction 2 and azimuthal direction 3 are shown again in FIG. 13 for reference. It is contemplated that any number of inline gas inlet apertures 850 could be utilized, and that inline gas inlet apertures 850 could be used in combination with gas inlet apertures at other angles and/or with variations of gas manifold 810, as illustrated in FIGS. 10 and 11.

FIG. 14 schematically illustrates a plasma block 210(9) of a direct outlet toroidal plasma source 900, showing how outlet apertures 270 may be defined at a plurality of angles 920 with respect to a surface normal of a plate 910 that forms one axial side thereof. Direction 10 of the toroidal axis, and radial direction 2, are shown again in FIG. 14 for reference; azimuthal direction arcs in and out of the plane of FIG. 14. Forming outlet apertures 270 at a plurality of angles can help in distributing plasma products broadly into an adjacent plasma processing apparatus, to facilitate uniform processing.

FIG. 15A is a schematic bottom view illustration of a direct outlet toroidal plasma source 1000 in which four outlet apertures 270 are defined. The view of FIG. 15 schematically depicts a bottom plate of direct outlet toroidal plasma source 1000, with approximate boundaries of a plasma block on the other side of the plate suggested by broken lines. Even with only four outlet apertures 270, plasma source 1000 may provide significantly more uniform processing than prior art remote plasma sources that extract output from only one aperture. Toroidal axis 1 extends into the planes of FIGS. 15A and 15B; radial direction 2 and azimuthal direction 3 are shown in FIG. 15A for reference but are omitted in FIG. 15B for clarity of illustration. FIG. 15B is a schematic bottom view illustration of a direct outlet toroidal plasma source 1100 in which over sixty outlet apertures 270 are defined. The view of FIG. 15B schematically depicts a bottom plate of direct outlet toroidal plasma source 1100, with approximate boundaries of a plasma block on the other side of the plate suggested by broken lines. Geometries and materials of the corresponding plasma block, number and placement of magnetic elements and induction coils may be optimized to generate a uniform plasma distribution within the plasma block such that plasma products extracted through outlet apertures 270 are spatially uniform across plasma source 1100. In embodiments, a direct toroidal plasma source may include hundreds or thousands of outlet apertures 270.

FIG. 16 schematically illustrates, in a cross-sectional view, a plasma wafer processing system 1200 that includes two direct outlet toroidal plasma sources 1201 and 1202. Only representative components of processing system 1200 are labeled, and FIG. 16 is not drawn to scale, for clarity of illustration. The toroidal axis 1 and radial direction 2 are shown again in FIG. 16 for reference; azimuthal direction arcs in or out of the planes of FIG. 16, changing sign from left to right of toroidal axis 1. Plasma wafer processing system defines a process chamber 1234 that is radially symmetric about toroidal axis 1; thus plasma source 1201 may be considered an outer plasma source while plasma source 1202 may be considered an inner plasma source, with the toroidal axes of plasma sources 1201 and 1202, and an axis of symmetry of plasma chamber 1234, all being coincident. Again, although FIG. 16 is an embodiment directed to wafer processing, it is understood that other embodiments may utilize the same principles for processing of other workpieces.

Plasma wafer processing system 1200 utilizes plasma sources 1201 and 1202 to generate plasma products, and is configured for optional mixing of the plasma products with un-activated gases as they move from the location of the plasma to a workpiece 50 being processed. Plasma wafer processing system 1200 defines a process chamber 1234 in which a pedestal 1235 positions a workpiece 50 at a processing location, as shown. Plasma source 1201 forms an outer toroidal shape, and plasma source 1202 forms an inner toroidal shape, atop a top surface 1232 of chamber 1234. Plasma sources 1201 and 1202 may receive source gases from inlet apertures 260 or 830, as shown in FIGS. 5 and 11 respectively, with or without a gas manifold 810 as shown in FIGS. 10 and 11; such structures are not shown in the view of FIG. 16. Each of plasma sources 1201 and 1202 includes a respective plasma block 210(10) or 210(11), and utilizes induction coils 230 and magnetic elements 220(3) to generate a plasma from the source gases therein. Plasma sources 1201 and 1202 share a common bottom plate 1210 that defines apertures 270 for distributing plasma products toward process chamber 1234.

Apertures 270 in the bottom plate 1210 provide uniform, axial direction (e.g., in the direction of the toroidal axis) and short paths for plasma products to be distributed from the plasma where they originate, to workpiece 50 being processed. The use of two plasma sources 1201 and 1202, with plasma source 1201 defining an outer toroid and plasma source 1202 defining an inner toroid, provides a significant degree of freedom in optimizing center-to-edge uniformity of processing for workpiece 50. Process recipes may be optimized by varying process parameters particular to plasma sources 1201 and 1202 and measuring effects on test and/or product wafers processed in system 1200. Overall gas flows and RF energy provided to plasma sources 1201 and/or 1202 may be adjusted until the effects are uniform across each workpiece 50 processed. In embodiments, plasma sources 1201 and 1202 may run different ratios of reactive gases than one another, and/or may utilize entirely different source gases than one another.

Processing system 1200 also provides gas inlets 1270 that pass through bottom plate 1210 and top surface 1232, for supplying un-activated gases to be mixed with the plasma products (see also FIG. 17A). The number and distribution of apertures 270 and/or gas inlets 1270 shown in FIGS. 16 and 17A are representative only, and may vary among embodiments.

Bottom plate 1210 is separate from top surface 1232 of chamber 1234 in embodiments, as shown, for ease of assembly and interchangeability of parts. That is, plasma sources 1201 and 1202 may be assembled with bottom plate 1210 and installed or removed from top surface 1232 as a single unit. However, in embodiments, the features of bottom plate 1210 and top surface 1232 may be combined in a single plate.

FIG. 16 also shows an optional diffuser plate 1237 that defines apertures 1247 for the plasma products to proceed into process chamber 1234. Diffuser plate 1237 can also include one or more gas passages 1239 to conduct un-activated gases that can mix with the plasma products. For example, as shown in FIG. 16, gas passage 1239 connects with output gas apertures 1241 defined in a chamber-facing side of diffuser plate 1237 (see also FIG. 17B). The number and distribution of apertures 1247 and/or output gas apertures 1241 shown in FIGS. 16 and 17B are representative only, and may vary among embodiments.

FIG. 17A schematically illustrates an upward facing, schematic plan view of top surface 1232 of plasma processing system 1200, FIG. 16, with features of bottom plate 1210 of direct toroidal plasma sources 1201 and 1202 visible. Only representative components of top surface 1232 and bottom plate 1210 are labeled, and FIG. 17A is not drawn to scale, for clarity of illustration. The toroidal axis, radial and azimuthal directions are not shown in FIGS. 17A and 17B, but can be determined from those shown in other drawings. The numerous apertures 270 provide paths for plasma products from plasma sources 1201 and 1202 that are very short and uniform in length, from the plasmas where they are generated, to the workpiece being processed, promoting uniform processing across chamber 1234. For example, paths from plasma within plasma sources 1201 and/or 1202, to any location on workpiece 50, may be less than four inches, in embodiments. Providing gas inlets 1270 interspersed with apertures 270 enables mixing un-activated gases with the plasma products. Certain embodiments advantageously process wafers with plasma products and un-activated gases as they emerge from the structures shown in FIG. 17A, that is, in processing systems 1200 that do not include diffuser 1237. Other embodiments may benefit from the additional gas and plasma product mixing provided by diffuser plate 1237.

FIG. 17B schematically illustrates an upward facing, schematic plan view of diffuser 1237. Only representative features of diffuser plate 1237 are labeled, and FIG. 17B is not drawn to scale, for clarity of illustration. Apertures 1247 (illustrated as open circles) extend all the way through diffuser plate 1237, while outlet gas apertures 1241 (illustrated as dots) extend only into the bottom surface of diffuser plate 1237, where they are supplied with un-activated gas from gas passage 1239. Diffuser 1237 facilitates further mixing and fine control of ratios of plasma products to un-activated gases, which may be advantageous for some plasma processes, but may be unnecessary for others.

FIG. 18 schematically illustrates, in a cross-sectional view, a plasma wafer processing system 1300 that includes two direct outlet toroidal plasma sources 1301 and 1302. Again, although FIG. 18 is an embodiment directed to wafer processing, it is understood that other embodiments may utilize the same principles for processing of other workpieces. Many features of processing system 1300 will be recognized as substantially similar to systems previously described and are not described again. The toroidal axis 1 and radial direction 2 are shown again in FIG. 18 for reference; azimuthal direction arcs in or out of the planes of FIG. 18, changing sign from left to right of toroidal axis 1. Plasma wafer processing system defines a process chamber 1334 that is radially symmetric about toroidal axis 1; thus plasma source 1301 may be considered an outer plasma source while plasma source 1302 may be considered an inner plasma source, with the toroidal axes of plasma sources 1301 and 1302, and an axis of symmetry of plasma chamber 1334, all being coincident. FIG. 18 illustrates the additional feature of plasma blocks 210(12) and 210(13) that are in open fluid communication with underlying spaces, rather than being bounded by bottom plates. FIG. 18 also illustrates a domain separator 1360.

Similar to the respective locations of plasma sources 1201 and 1202, plasma sources 1301 and 1302 define inner and outer toroidal shapes atop a process chamber 1334. Plasma sources 1301 and 1302 may receive source gases from inlet apertures 260 or 830, as shown in FIGS. 5 and 11 respectively, with or without a gas manifold 810 as shown in FIGS. 10 and 11; such structures are not shown in the view of FIG. 18. Within process chamber 1334, a pedestal 1335 positions workpiece 50 for processing. Plasma blocks 210(12) and/or 210(13) form substantially azimuthally continuous openings 1370 on a first axial side thereof, that is, plasma sources 1301 and 1302 are not substantially bounded on the first axial side, as are plasma sources 1201, 1202 and others previously discussed. Openings 1370 may be substantially azimuthally continuous in that they extend significantly in the azimuthal direction through top plate 1332, however, in this context “substantially azimuthally continuous” does not preclude interruptions to openings 1370 to provide mechanical support for radially inner portions of top plate 1332; openings corresponding to at least about 75% of the major circumference of either plasma source would be considered substantially azimuthally continuous. Also, it is not critical that both plasma blocks 210(12) and 210(13) define substantially azimuthally continuous openings; in embodiments, one of plasma blocks 210(12) and 210(13) defines a substantially azimuthally continuous opening while the other does not. Thus, plasma cavities of plasma sources 1301 and 1302 are in fluid communication with spaces 1355, 1357 formed in an upper portion of process chamber 1334, such that plasma products will pass out of plasma blocks 210(12) and 210(13) through openings 1370 into spaces 1355 and 1357. From spaces 1355, 1357 the plasma products pass through a diffuser plate 1337 into process chamber 1334.

Plasma wafer processing system 1300 may, of course, include provisions for supplying source gases to plasma sources 1301 and 1302 (such as individual gas inlet apertures and/or gas manifolds as described in connection with FIGS. 10-13) and for adding further gases to the plasma products, such as gas inlets 1270 and/or gas passages 1239 illustrated in FIGS. 16, 17A and 17B.

The open design of plasma blocks 210(12) and 210(13) means that pressure in each of spaces 1355, 1357 beneath each plasma block will be substantially determined by input gas flow to the respective plasma blocks. Separation of spaces 1355 and 1357 can thus be maintained, if desired, by using a domain separator 1360. Domain separator 1360 is a circular feature that contacts both top plate 1332 and diffuser plate 1337 about its complete circumference; the cross-sectional view of FIG. 18 shows only two portions of domain separator 1360 that pass through the cross-sectional plane. Domain separator 1360 is typically formed of dielectric material and enforces a separation between plasma products supplied to a center region and an edge region of process chamber 1334. This separation can be used, in embodiments, to control center and edge processing effects separately within process chamber 1334, and thus to optimize center-to-edge processing uniformity at workpiece 50.

The provisions for supplying source gases to plasma sources 1301 and 1302 may be independently controllable so that process effects at a center region and an edge region of the process chamber (e.g., corresponding approximately to those regions most influenced by plasma sources 1302 and 1301 respectively) can be adjusted for best processing uniformity. Independent controllability of source gases to plasma sources 1301 and 1302 may be advantageous whether or not domain separator 1360 is present.

From the preceding descriptions, it should be clear that one, two or more toroidal plasma sources may be utilized to provide uniform distributions of plasma products to a process chamber, by extracting the plasma products from axial sides of the plasma sources along short travel paths to the process chamber. A plurality of toroidal plasma sources may be disposed with elements such as respective plasma blocks, dielectric breaks of the plasma blocks, magnetic elements, induction coils, cooling apparatus, output apertures, inlet gas manifolds and other associated elements arranged for best uniformity and shortest travel paths of plasma products to the process chamber.

Having described several embodiments, it will be recognized by those of skill in the art that various modifications, alternative constructions, and equivalents may be used without departing from the spirit of the invention. Additionally, a number of well-known processes and elements have not been described in order to avoid unnecessarily obscuring the present invention. Accordingly, the above description should not be taken as limiting the scope of the invention.

Where a range of values is provided, it is understood that each intervening value, to the tenth of the unit of the lower limit unless the context clearly dictates otherwise, between the upper and lower limits of that range is also specifically disclosed. Each smaller range between any stated value or intervening value in a stated range and any other stated or intervening value in that stated range is encompassed. The upper and lower limits of these smaller ranges may independently be included or excluded in the range, and each range where either, neither or both limits are included in the smaller ranges is also encompassed within the invention, subject to any specifically excluded limit in the stated range. Where the stated range includes one or both of the limits, ranges excluding either or both of those included limits are also included.

As used herein and in the appended claims, the singular forms “a”, “an”, and “the” include plural referents unless the context clearly dictates otherwise. Thus, for example, reference to “a process” includes a plurality of such processes and reference to “the electrode” includes reference to one or more electrodes and equivalents thereof known to those skilled in the art, and so forth. Also, the words “comprise,” “comprising,” “include,” “including,” and “includes” when used in this specification and in the following claims are intended to specify the presence of stated features, integers, components, or steps, but they do not preclude the presence or addition of one or more other features, integers, components, steps, acts, or groups. 

I claim:
 1. A plasma processing system, comprising: a process chamber that includes a wafer pedestal, wherein the process chamber extends upwards at least from the wafer pedestal to a plane that is horizontal and above a top surface of the wafer pedestal; and a plasma source, comprising an induction coil, a magnetic core element and a plasma generation block that defines a toroidal plasma cavity, wherein: in operation, the plasma source generates a plasma in the plasma cavity; the plasma generation block and the plasma cavity are substantially radially symmetric about a toroidal axis that defines an axial direction and a radial direction; the plasma generation block defines a plurality of outlet apertures on a first axial side of the plasma cavity, wherein plasma products produced by the plasma pass in the axial direction, through the plurality of outlet apertures, from the plasma cavity, through the plane and into the process chamber; the induction coil winds at least partially about the magnetic core element, and the magnetic core element is disposed adjacent to the plasma generation block, and extends from a first end that is at or above the plane, on a radially outward side of the plasma generation block, passes above the plasma generation block on a second axial side of the plasma cavity that is axially opposite to the first axial side, and to a second end that is at or above the plane, on a radially inward side of the plasma generation block, but does not extend below the plane; such that during operation, a current in the induction coil induces a magnetic flux in the magnetic core element, and the magnetic flux in the magnetic core element induces an azimuthal electric current within the plasma cavity, to generate the plasma.
 2. The plasma processing system of claim 1, the plasma generation block comprising aluminum and including a plurality of dielectric breaks that, during operation, interrupt azimuthal currents induced in the aluminum by the magnetic flux.
 3. The plasma processing system of claim 2, wherein the magnetic core element is one of two magnetic core elements, and each of the two magnetic core elements is arranged about the plasma generation block in azimuthal alignment with corresponding ones of the dielectric breaks.
 4. The plasma processing system of claim 1, the process chamber being substantially radially symmetric about the toroidal axis, the plurality of outlet apertures being arranged symmetrically with respect to the toroidal axis and with a plurality of the outlet apertures at each of at least three different radii relative to the toroidal axis, such that the plasma products are distributed uniformly, across the radial direction, from the plasma cavity toward the process chamber.
 5. The plasma processing system of claim 1, wherein the plasma generation block is flattened at the plane on the first axial side of the plasma cavity and rounded on the second axial side of the plasma cavity.
 6. The plasma processing system of claim 5, wherein the magnetic core element is rounded so as to maintain proximity to the plasma generation block from the first end, on the radially outward side of the plasma generation block, about the plasma generation block on the second axial side, to the second end, on the radially inward side of the plasma generation block.
 7. The plasma processing system of claim 1, wherein the plasma generation block is flattened at the plane, and the first and second ends of the magnetic core element extend to, but not through, the plane.
 8. The plasma processing system of claim 1, wherein the magnetic core element at least partially encloses a cooling tube through which, during operation, a liquid flows to remove heat dissipated by the magnetic core element.
 9. A single wafer plasma processing system, comprising: a process chamber, wherein the process chamber is substantially radially symmetric about a toroidal axis, the process chamber includes a pedestal that positions a single wafer for processing within the process chamber, and the pedestal is disposed substantially concentric with the toroidal axis and positions the single wafer concentric with the toroidal axis; a plasma source that, during operation, generates a plasma in a toroidal plasma cavity, the plasma source comprising a plasma generation block, comprising at least two metal sections interspersed with at least two dielectric breaks along a major circumference of the toroidal plasma cavity, wherein each of the dielectric breaks consists of dielectric material that encircles a minor circumference of the plasma cavity, such that no metal exists within an azimuthal section of the plasma generation block at each of the dielectric breaks; and at least two magnetic elements adjacent to the toroidal plasma cavity that partially encircle, but do not completely encircle, a minor circumference of the toroidal plasma cavity, wherein each of the magnetic elements is adjacent to the toroidal plasma cavity on a radially inner side of the toroidal plasma cavity, a side of the toroidal plasma cavity that faces away from the process chamber, and a radially outer side of the toroidal plasma cavity, and wherein the major circumference of the toroidal plasma cavity is substantially radially symmetric about the toroidal axis, the plasma source defines a plurality of outlet apertures on a first axial side of the toroidal plasma cavity, during operation, plasma products produced by the plasma pass in the axial direction, through the plurality of outlet apertures, from the toroidal plasma cavity, toward the process chamber, and at least some of the outlet apertures penetrate the dielectric breaks.
 10. The plasma processing system of claim 9, further comprising a diffuser plate defining a plurality of second apertures therethrough, disposed between a second cavity and the process chamber, such that during operation, the plasma products pass through the plurality of outlet apertures into the second cavity, and through the second apertures to enter the process chamber, and wherein: the diffuser plate extends along a continuous plane at a fixed height from the pedestal from the toroidal axis to a radial limit of the diffuser plate; and at least some of the second apertures are radially further from the toroidal axis than a radius of the pedestal.
 11. The plasma processing system of claim 10, the diffuser plate defining one or more gas passages that, during operation, conduct un-activated gases that have not passed through the toroidal plasma cavity, to the process chamber, and wherein the gas passages form outlets on a side of the diffuser plate that faces the process chamber.
 12. The plasma processing system of claim 9, wherein each of the metal sections and each of the dielectric breaks form respective planar surfaces on the first axial side of the toroidal plasma cavity.
 13. The plasma processing system of claim 12, wherein: each of the metal sections and each of the dielectric breaks form respective curved surfaces on a second axial side of the toroidal plasma cavity, and each of the at least two magnetic elements are rounded so as to maintain proximity to the metal sections and the dielectric breaks on the radially outer side, the second axial side, and the radially inner side, of the toroidal plasma cavity.
 14. The plasma processing system of claim 9, wherein respective cooling tubes pass through the at least two magnetic elements, and during operation, liquid flows through the cooling tubes to remove heat dissipated by the at least two magnetic elements. 